SATAKE, Takahiko; KAWASAKI, Hiroharu; AOQIU, Shin-Ichi. Indium-gallium-zinc oxide thin-film preparation via single-step radio frequency sputter deposition using mixed-oxide powder targets. Archives of Electrical Engineering , [S. l.], v. 72, n. 2, p. 555–563, 2023. DOI: 10.24425/aee.2023.145425. Disponível em: https://wydawnictwo.pan.pl/index.php/aee/article/view/5812. Acesso em: 17 oct. 2026.