Satake, Takahiko, Hiroharu Kawasaki, and Shin-Ichi Aoqiu. 2023. “Indium-Gallium-Zinc Oxide Thin-Film Preparation via Single-Step Radio Frequency Sputter Deposition Using Mixed-Oxide Powder Targets”. Archives of Electrical Engineering 72 (2):555-63. https://doi.org/10.24425/aee.2023.145425.