Production of TiO2 with Scrap Collected by Trap in the TiN Process

Abstract

This study synthesized nano-sized TiO₂ using scrap from the TiN thin film manufacturing process by a hydrothermal reaction. By controlling the reaction temperature and concentration, the crystal structure and particle size were controlled. The solution from the TiN scrap was strongly acidic with a pH below 0. The mixed TiO₂ of rutile and anatase crystal structures was produced at a concentration of 0.08 mole. The TiO2 particle size ranged from 4 nm to 8 nm, increased from 7 nm to 140 nm after heat treatment. At temperatures above 800°C, the crystal structure of the mixed TiO2 transformed into pure rutile.