Shin, Jin Kyeong, Su Min Eun, Yeong Tae Choi, and Byung Joon Choi. “UV Pulse Sequence-Dependent Properties of Al2O3 Films Via UV-Assisted Atomic Layer Deposition”. Archives of Metallurgy and Materials 71, no. 2 (June 22, 2026): 523–526. Accessed August 16, 2026. https://wydawnictwo.pan.pl/index.php/amm/article/view/2163.