WOSKO, Mateusz; PASZKIEWICZ, Bartłomiej; PASZKIEWICZ, Bogdan; ILGIEWICZ, Grzegorz; SANKOWSKA, Iwona; PASZKIEWICZ, Regina. Metalorganic vapour phase epitaxy of GaN-based structures grown on etched and non-etched Si(115) substrates for piezoelectric component separated devices. Bulletin of the Polish Academy of Sciences Technical Sciences, [S. l.], v. 73, n. 5, p. e154728, 2025. DOI: 10.24425/bpasts.2025.154728. Disponível em: https://wydawnictwo.pan.pl/index.php/bpasts/article/view/938. Acesso em: 28 may. 2026.