Detection system for a miniature MEMS X-ray source

Authors

  • Paweł Urbański Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology ul. Janiszewskiego 11/17, 50-372 Wrocław, Poland https://orcid.org/0009-0001-7643-3182
  • Tomasz Grzebyk Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology ul. Janiszewskiego 11/17, 50-372 Wrocław, Poland https://orcid.org/0000-0002-2283-0027

DOI:

https://doi.org/10.24425/opelre.2023.147038

Abstract

The article presents the results of experiments on a detection system used for detecting signals from a miniature, low-energy micro-electro-mechanical system (MEMS) X-ray source. The authors propose to use a detection based on luminescence phenomena occurring in luminophore and scintillators to record the visual signal on a CMOS/CCD detector. The main part of the article is a review of various materials of scintillators and luminophores which would be adequate to convert low-energy X-ray radiation (E < 25 keV – it is a range not typical for conventional X-ray systems) to visible light. Measurements obtained for different energies, exposure times, and different targets have been presented and analysed.

Downloads

Published

2026-03-13

How to Cite

Urbański, Paweł, and Tomasz Grzebyk. “Detection System for a Miniature MEMS X-Ray Source”. Opto-Electronics Review, vol. 31, no. 4, Mar. 2026, p. e147028, doi:10.24425/opelre.2023.147038.

Issue

Section

Articles